Injin Lithography Mask Mai Daidaita Hoto Mai Zane-zane
Gabatarwar samfur
Tushen hasken da ke haskakawa yana amfani da tsarin UV LED da aka shigo da shi da kuma tsarin siffanta tushen haske, tare da ƙaramin zafi da kwanciyar hankali mai kyau na tushen haske.
Tsarin hasken da aka juya yana da kyakkyawan tasirin watsa zafi da kuma tasirin kusancin tushen haske, kuma maye gurbin da gyara fitilar mercury suna da sauƙi kuma masu dacewa. An sanye shi da babban na'urar hangen nesa ta binocular dual field microscope da kuma LCD mai faɗi inci 21, ana iya daidaita shi ta hanyar gani.
nunin ido ko CCD +, tare da daidaito mai kyau, tsari mai fahimta da aiki mai dacewa.
Siffofi
Tare da aikin sarrafa guntu
Matsi na lamba mai daidaitawa yana tabbatar da maimaitawa ta hanyar firikwensin
Ana iya saita gibin daidaitawa da gibin fallasa ta hanyar dijital
Amfani da kwamfuta da aka haɗa + aikin allon taɓawa, mai sauƙi da dacewa, kyakkyawa da karimci
Nau'in jan faranti sama da ƙasa, mai sauƙi kuma mai dacewa
Tallafawa watsawar lamba ta injin, watsawar lamba mai wuya, watsawar lamba ta matsin lamba da kuma watsawar kusanci
Tare da aikin dubawa na nano bugu
Bayyanar Layer ɗaya tare da maɓalli ɗaya, babban mataki na sarrafa kansa
Wannan injin yana da ingantaccen aminci da kuma kyakkyawan nuni, musamman ya dace da koyarwa, binciken kimiyya da masana'antu a Kwalejoji da jami'o'i
Ƙarin bayani
Ƙayyadewa
1. Yankin fallasa: 110mm × 110mm;
2. ★ Tsawon tsayin daka: 365nm;
3. Resolution: ≤ 1m;
4. Daidaiton daidaito: 0.8m;
5. Matsakaicin motsi na teburin duba tsarin daidaitawa ya kamata ya cika aƙalla: Y: 10mm;
6. Bututun haske na hagu da dama na tsarin daidaitawa na iya motsawa daban-daban a cikin jagororin X, y da Z, alkiblar X: ± 5mm, alkiblar Y: ± 5mm da alkiblar Z: ± 5mm;
7. Girman abin rufe fuska: inci 2.5, inci 3, inci 4, inci 5;
8. Girman samfurin: guntu, 2 ", 3", 4 ";
9. ★ Ya dace da kauri samfurin: 0.5-6mm, kuma zai iya ɗaukar sassan samfurin 20mm a mafi yawan lokuta (an keɓance shi);
10. Yanayin fallasawa: lokaci (yanayin ƙidayar lokaci);
11. Rashin daidaiton haske: ＜ 2.5%;
12. Na'urar hangen nesa ta CCD mai layi biyu: ruwan tabarau mai zuƙowa (sau 1-5) + ruwan tabarau mai hangen nesa na microscope;
13. Motsin abin rufe fuska idan aka kwatanta da samfurin ya kamata ya kai aƙalla: X: 5mm; Y: 5mm; : 6º；
14. ★ Yawan kuzarin da ake fitarwa: > 30MW / cm2,
15. ★ Matsayin daidaitawa da matsayin fallasa suna aiki a tashoshi biyu, kuma maɓallan injin servo guda biyu suna aiki ta atomatik;
16. Matsi mai daidaita lamba yana tabbatar da maimaitawa ta hanyar firikwensin;
17. ★ Ana iya saita gibin daidaitawa da gibin fallasa ta hanyar dijital;
18. ★ Yana da hanyar haɗin nano da kuma hanyar haɗin kusanci;
19. ★ Aikin allon taɓawa;
20. Girman gaba ɗaya: Kimanin 1400mm (tsawo) 900mm (faɗi) 1500mm (tsawo).
